| Recommended semester: 1st - 4th semester |
| Scope and form: Lectures, exercises, and a project, 2x4 hours a week. |
| Evaluation: Oral exam and approval of reports
|
| Examination: 13-scale |
| Prerequisites: Elementary electromagnetism and mechanics |
Aim: Solid-state devices made using micro technology are used in a broad range of products ranging from the transistor in a Pentium processor to the air bag sensor in a car.
The goal of this course is to give you an understanding of how these solid-state devices work and how they are made. When you have followed this course, you will be able to design a simple fabrication process for a solid-state device (for example a bipolar transistor or an air bag sensor) and to calculate the current voltage relationship. You will be able to do this both analytically and with the help of computer aided design and simulation tools. |
Contents: This course covers introductory solid-state physics in a degree sufficient to allow an understanding of different devices. The topics are:
· crystal structure
· electrons and holes in intrinsic and doped semiconductors
· energy band diagrams and energy band gaps
· transport mechanisms: drift and diffusion, injection and recombination
· piezo resistivity
The working principle and fabrication process for a range of solid-state devices will be described. This includes the:
· pn junction diode
· bipolar transistor
· metal-semiconductor junction
· MOSFET
· JFET
· solar cells and photo detectors
· piezo resistive devices (i.e. pressure and airbag sensors)
The course also covers introductory micro technology to a degree sufficient to allow for design of simple process recipes for solid-state devices:
· crystal growth and epitaxy
· photolithography
· wet and dry etching
· thermal oxidation
· diffusion and ion-implantation
· thin film deposition
· LPCVD processes
To be able to design simple fabrication processes the course also covers the use of computer-based tools for design and simulation of solid-state devices. A series of laboratory exercises is dedicated to characterisation of devices.
In the final part of the course you will work more closely with a chosen device and write a report that describes how the device works and how it could be made. During this part of the course you can also use computer aided design and simulation. |
| Contact: Erik Vilain Thomsen, building 345ø, (+45) 4525 5790, evt@mic.dtu.dk |
| Department: 033 Mikroelektronik Centret |
| Keywords: semiconductor devices, solid-state electronics, micro technology, computer aided design and simulation |
| Updated: 08-05-2001 |
