| 33355 Microtechnology and Microsystems |
| Danish title: Mikroteknologi og mikrosystemer |
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Language: English ECTS-creditpoints: 10, External examination.
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Exam schedule:
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F2-A (maj 29 2002), E2-A (dec 12 2001) |
| Recommended semester: 7th - 9th semester |
| Scope and form: Lectures, exercises, and a project, 2x4 hours a week. |
| Evaluation: Oral presentation and approval of reports
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| Examination: 13-scale |
Aim: A microsystem is a small system built from a number of functional parts: electronics, mechanics, optics, and / or microfluidics. All parts are fabricated partly or fully using microfabrication technology and they form a single entity. A hearing instrument, or a micro total analysis system are examples of such microsystems. In every modern car you will find a number of microsystems for instance the air-bag accelerometer for the air bag control.
The course will give you skills to:
1) choose the proper microfabrication technology for a given microsystem application,
2) judge whether a microsystem is the proper choice for a given application,
3) design or develop the fabrication process sequence for a given microsystem,
4) design microsystems for a number of applications. |
| Contents: Introduction to the world of microsystems. Description of the microfabrication technology: Lithography, etching, thin film deposition, doping, ion implantation, electrochemical deposition, bonding, encapsulation, and crystal growth. Description of microsystem construction elements, useful transduction principles for sensors and actuators, and their scalability. Selected microsystem examples for important application areas. CAD and CAE tools for microsystems. In the final part of the course you will work on a practical microsystem project. |
Contact: Ole Hansen, building 345ø, (+45) 4525 5715, oh@mic.dtu.dk
Aric Menon, building 345E/058, tlf (+45)4525 6329, am@mic.dtu.dk |
| Department: 033 Mikroelektronik Centret |
| Keywords: Microsystems, MEMS, Microtechnology |
| Updated: 08-05-2001 |
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