| Recommended semester: 4th -7th semester |
| Scope and form: Experimental work for 3 weeks 8 hours a day. |
| Evaluation: Approval of coursework/reports
|
| Examination: Pass/fail |
| Previous course: 44471 |
| No credit points with: 44471 |
| Participant limitation: Max. 16 |
| Aim: To introduce you to the experimental techniques and the technology used in Micro- and Nanotechnology. |
Contents: The course is an experimental project, and the content of the project is strongly related to the ongoing research at MIC. Hence, the actual project subjects vary from term to term. Examples of previous projects:
Fabrication of AFM probes with Reactive Ion Etched tips.
Evaluation of Piezoresistive AFM probes.
Evaluation of Piezoelectric micro-machined accelerometer.
Investigation of STM induced Hydrogen desorbtion from Silicon surfaces.
Investigation of Silicon Fusion Bonding in UHV.
Corrosion resistance of Tantalum Oxide. |
| Contact: Ole Hansen, building 345ø, (+45) 4525 5715, oh@mic.dtu.dk |
| Department: 033 Mikroelektronik Centret |
| Keywords: Microtechnology, Nanotechnology, AFM, STM, thin films |
| Updated: 15-03-2001 |
