| |
| Previous course: C4410 |
| Offered by:
Mikroelektronik Centret
(MIC) |
| No credit points with: C4410 |
| Prerequisite: C4450/44250 |
| Recommended semester:
7th - 9th semester |
| Limitation: Max. 20 |
| Scope and form: 2 lectures per week in the first 10 weeks, desk-top projekts in the second part of the semester. |
| Examination:
Assesment of written reports and of oral exam.
(13 point scale
) |
| Remarks: This course is compulsory for those who want to do their master's project in Micromechanics. The course will be in English. |
| Contact person: |
Siebe Bouwstra, MIC, Building 349, Tel. +45 4525 6306 |
|
| Aim: To enable the students to evaluate silicon micromechanics for transducers applications and microfluidic systems. The course also describes engineering tools that enable the students to dimension micromechanical components and to sketch their fabrication processing. |
| Contents: Introduction to Micromechanics, thin film technology, bulk micromachining, surface micromachining, bonding, packaging, microsystem concepts, elementary mechanics, application of finite elements method, electromechanical and optomechanical transducer mechanisms, examples of micromechanical sensors and actuators as well as microfluidie and chemical analysis systems. |
