| Type: | Open University
Language: English |
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Previous course: C4450
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No credit points with: C4450
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Prerequisite: 10207.21010/10004/10005
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Recommended semester: 6th semester
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Scope and form: 2 lectures a week. 2 afternoons with compulsory exercises.
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Examination: Oral exam (13-scale)
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Participant limitation: max. 30
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Remarks: Basic knowledge on solid state electronics and physical chemistry is required
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| Contact person: | Ole Hansen, Building 345ø, Tel. +45 4525 5715, email oh@mic.dtu.dk |
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Department: Mikroelektronik Centret
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Aim: To teach the student to: 1) use and evaluate available processes for fabrication of integrated circuits and semiconductor devices. 2) understand the equipment and the methods used in fabrication. 3) based on this knowledge, make detailed process descriptions for the fabrication of integrated circuits and semiconductor devices. 4) evaluate the results of the processing and understand the connection between the physical models used and the fabrication procedure used.
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Contents: Physics and chemistry of semiconductor process technologies, including: Crystal growth, epitaxy, thin film technology, low pressure CVD, thermal oxidation, solid state diffusion, ion implantation, wet and dry etching, micro lithography, encapsulation, and electrical and physical evaluation of materials.
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