| Type: | Open University
Language: English |
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Previous course: C4470
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No credit points with: C4470
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Prerequisite: 10207.21010/10004/10005
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Recommended semester: 6th or 7th semester
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Scope and form: Experimental work for 3 weeks 8 hours a day.
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Examination: Evaluation of report(s) (Pass/fail)
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| Contact person: | Ole Hansen, Building 345ΓΈ, Tel. +45 4525 5715, email oh@mic.dtu.dk |
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Department: Mikroelektronik Centret
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Aim: To introduce the experimental techniques used in the fabrication and characterization of semiconductor devices.
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Contents: The course is an experimental project, and the content of the project is strongly related to the ongoing research at MIC. Hence, the actual subjects vary from term to term. Examples of previous projects:
Evaluation of CMOS-SOI transistors.
Optimisation of External Boron Base Implants for SiGe HBT transistors.
Optimisation of the Growth Conditions for Reactive Sputtering of Tantalum Oxide.
Interrelation of the Growth Conditions and the Piezo-coefficient of Polysilicon.
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