| Type: | Open University
Language: English |
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Previous course: C4410
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No credit points with: C4410
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Prerequisite: 44250
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Recommended semester: 7th - 9th semester
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Scope and form: 2 lectures per week in the first 7 weeks, desk-top projekts in the second part of the semester.
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Examination: Assesment of written reports and of oral exam. (13-scale)
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Participant limitation: max. 20
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Remarks: This course is compulsory for those who want to do their master's project in Micromechanics. The course and the master's project can be conducted simultaneously.
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Department: Mikroelektronik Centret
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Aim: To enable the students to evaluate silicon micromechanics for transducers applications and microfluidic systems. The course also describes engineering tools that enable the students to dimension micromechanical components and to sketch their fabrication processing.
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Contents: Introduction to Micromechanics, thin film technology, bulk micromachining, surface micromachining, electroplating, bonding, packaging, microsystem concepts, elementary mechanics, application of finite elements method, electromechanical and optomechanical transducer mechanisms, integration technologies, examples of micromechanical sensors and actuators as well as microfluidic and chemical analysis systems.
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